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ACM Research Launches New Furnace Tool For Thermal Atomic Layer Deposition To Support Advanced Semiconductor Manufacturing Requirements

ACM Research Launches New Furnace Tool For Thermal Atomic Layer Deposition To Support Advanced Semiconductor Manufacturing Requirements

ACM研究公司推出用于热原子层沉积的新炉具以满足先进半导体制造要求
Benzinga Real-time News ·  2022/09/27 16:11

FREMONT, Calif., Sept. 27, 2022 (GLOBE NEWSWIRE) -- ACM Research, Inc. (ACM) (NASDAQ:ACMR), a leading supplier of wafer processing solutions for semiconductor and advanced wafer-level packaging (WLP) applications, today announced that it has expanded its 300mm Ultra Fn furnace dry processing platform with the introduction of its Ultra Fn A furnace tool. The Ultra Fn A system adds thermal atomic layer deposition (ALD) to ACM's extensive list of supported furnace applications. The company also announced that it has shipped the first Ultra Fn A furnace tool to a top-tier China-based foundry manufacturer. The product is expected to be qualified in 2023.

加利福尼亚州弗里蒙特,9月环球通讯社2022年3月27日电为半导体和先进晶圆级封装(WLP)应用提供晶片加工解决方案的领先供应商ACM Research,Inc.(纳斯达克股票代码:ACMR)今天宣布,该公司推出了其Ultra FN A炉具,从而扩展了其300 mm的Ultra FN炉干式加工平台。Ultra FN A系统将热原子层沉积(ALD)添加到ACM广泛支持的炉子应用列表中。该公司还宣布,它已经向中国一家顶级铸造制造商发运了第一台Ultra FN A炉具。预计该产品将于2023年合格。

"As logic nodes continue to shrink, customers are increasingly looking for suppliers that are willing to collaborate to meet their advanced process requirements, like ALD," said David Wang, CEO and president of ACM. "ALD is one of the fastest growing applications for manufacturing at advanced nodes, making it a critical new capability for our furnace portfolio. ACM's deep understanding of the entire semiconductor manufacturing process and our innovative capabilities allow us to quickly develop new applications – wet and dry – to meet emerging market requirements. Our new ALD tool builds on our extensive furnace platform, which also includes support for atmospheric, low-pressure and ultra-high vacuum furnace options."

“随着逻辑节点的持续缩小,客户越来越多地寻找愿意合作以满足其先进工艺要求的供应商,如ALD,”ACM首席执行官兼总裁表示。ALD是先进节点制造业中增长最快的应用之一,使其成为我们熔炉产品组合的关键新功能。ACM对整个半导体制造过程的深刻理解和我们的创新能力使我们能够快速开发新的应用--湿法和干法--以满足新兴市场的需求。我们的新ALD工具建立在我们广泛的熔炉平台之上,其中还包括对常压、低压和超高真空炉选项的支持。

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