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ACM Research Launches New Furnace Tool For Thermal Atomic Layer Deposition To Support Advanced Semiconductor Manufacturing Requirements

ACM Research Launches New Furnace Tool For Thermal Atomic Layer Deposition To Support Advanced Semiconductor Manufacturing Requirements

ACM研究公司推出用於熱原子層沉積的新爐具以滿足先進半導體制造要求
Benzinga Real-time News ·  2022/09/27 16:11

FREMONT, Calif., Sept. 27, 2022 (GLOBE NEWSWIRE) -- ACM Research, Inc. (ACM) (NASDAQ:ACMR), a leading supplier of wafer processing solutions for semiconductor and advanced wafer-level packaging (WLP) applications, today announced that it has expanded its 300mm Ultra Fn furnace dry processing platform with the introduction of its Ultra Fn A furnace tool. The Ultra Fn A system adds thermal atomic layer deposition (ALD) to ACM's extensive list of supported furnace applications. The company also announced that it has shipped the first Ultra Fn A furnace tool to a top-tier China-based foundry manufacturer. The product is expected to be qualified in 2023.

加利福尼亞州弗裏蒙特,9月環球通訊社2022年3月27日電為半導體和先進晶圓級封裝(WLP)應用提供晶片加工解決方案的領先供應商ACM Research,Inc.(納斯達克股票代碼:ACMR)今天宣佈,該公司推出了其Ultra FN A爐具,從而擴展了其300 mm的Ultra FN爐乾式加工平臺。Ultra FN A系統將熱原子層沉積(ALD)添加到ACM廣泛支持的爐子應用列表中。該公司還宣佈,它已經向中國一家頂級鑄造製造商發運了第一臺Ultra FN A爐具。預計該產品將於2023年合格。

"As logic nodes continue to shrink, customers are increasingly looking for suppliers that are willing to collaborate to meet their advanced process requirements, like ALD," said David Wang, CEO and president of ACM. "ALD is one of the fastest growing applications for manufacturing at advanced nodes, making it a critical new capability for our furnace portfolio. ACM's deep understanding of the entire semiconductor manufacturing process and our innovative capabilities allow us to quickly develop new applications – wet and dry – to meet emerging market requirements. Our new ALD tool builds on our extensive furnace platform, which also includes support for atmospheric, low-pressure and ultra-high vacuum furnace options."

“隨着邏輯節點的持續縮小,客户越來越多地尋找願意合作以滿足其先進工藝要求的供應商,如ALD,”ACM首席執行官兼總裁表示。ALD是先進節點製造業中增長最快的應用之一,使其成為我們熔爐產品組合的關鍵新功能。ACM對整個半導體制造過程的深刻理解和我們的創新能力使我們能夠快速開發新的應用--濕法和幹法--以滿足新興市場的需求。我們的新ALD工具建立在我們廣泛的熔爐平臺之上,其中還包括對常壓、低壓和超高真空爐選項的支持。

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